Conventional MOCVD




Improved handling of metal alkyls
by the use of adducts: control of mass transport, control of reactivity
use as dopants control of flow rate




The picture below illustrates the air sensitivity of diethylzinc (DEZ)
[it can be clearly seen to burst into flames on contact with the air],
a commonly utilized MOCVD precursor for the deposition of  the constituent
zinc for materials such as ZnS or ZnSe :








Addition of a neutral Lewis Base molecule such as triethylamine to the
DEZ results in a non-flammable, air stable precursor, that can be readily
handled.


Below is an illustration of a typical simple MOCVD reactor in use in
our laboratories :










(c) Imperial College of Science, Technology and
Medicine, 1997


The following pages are still under construction
and therefore not in their final version.

Last updated 24-3-1997 by b.laermann@ic.ac.uk,
d.j.otway@ic.ac.uk. and
m.chunggaze@ic.ac.uk 


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